5D-NP-MATER_ZNOCMP - open dataset for "ZnO vapor phase infiltration into photo-patternable polyacrylate networks for the microfabrication of hybrid organic–inorganic structures"

This is the open dataset for the paper "ZnO vapor phase infiltration into photo-patternable polyacrylate networks for the microfabrication of hybrid organic–inorganic structures”. This includes supplementary information.本数据集为论文《用于有机-无机杂化结构微加工的氧化锌气相渗透光图案化聚丙烯酸酯网络》的开源数据集，包含补充信息。