超灵敏MEMS弱力传感器加工及测试标定数据

本数据集聚焦超灵敏MEMS弱力传感器加工制备、性能测试与标定全流程构建，旨在为MEMS传感器加工工艺优化、测试平台搭建及性能标定方法改进提供实测数据支撑。其产生过程采用SOI-MEMS工艺完成传感器加工，通过光学显微镜GP300C与扫描电子显微镜SEM4000Pro分别获取传感器整体及细节结构图像；搭建基于六轴纳米位移台（Nators）的测试平台，在光学平台隔振、真空环境（<0.1Pa）下，利用频率计数器与锁相放大器采集核心性能数据，同时采用解析分析与实验验证相结合的方式探究标定相对误差来源并提出控制策略。数据处理计算方式包括灵敏度换算、稳定性标准差计算、噪声功率谱密度分析及动态范围推导，核心数据涵盖原始测试信号与加工表征图像两类，存储格式以txt、csv为主，含部分xlsx、tiff格式。数据集包含5个核心数据文件：一为依照《超灵敏MEMS弱力传感器测试大纲》形成的测试结果报告；二是测试数据），含频率计数器采集的csv格式原始数据及锁相放大器获取的txt格式参考数据；三是图表合集，含xlsx格式加工参数及tiff格式扫描电子显微镜测量的关键线宽、刻蚀深度等数据；四是论文及专利相关资料。本数据集适用于微纳检测、精密力学测量等领域的技术研发，可为超灵敏MEMS弱力传感器在微纳材料力学性能评估等场景的应用奠定基础，同时为同类力传感器的测试标定提供可借鉴的技术方案。

This dataset focuses on establishing the entire process chain of fabrication, performance testing and calibration for ultra-sensitive MEMS weak-force sensors, aiming to provide empirical data support for the optimization of MEMS sensor fabrication processes, the construction of testing platforms, and the improvement of performance calibration methods. The fabrication of the sensors was completed using SOI-MEMS technology. Overall and detailed structural images of the sensors were acquired via the optical microscope GP300C and scanning electron microscope SEM4000Pro, respectively. A testing platform based on a six-axis nanometer displacement stage (Nators) was built. Core performance data were collected using frequency counters and lock-in amplifiers under vibration-isolated optical table conditions and a vacuum environment (<0.1 Pa). Meanwhile, the sources of relative calibration errors were explored and corresponding control strategies were proposed by combining analytical analysis and experimental verification. Data processing and calculation methods include sensitivity conversion, stability standard deviation calculation, noise power spectral density analysis, and dynamic range derivation. The core data cover two categories: original test signals and fabrication characterization images, with storage formats mainly being txt and csv, plus partial xlsx and tiff formats. The dataset contains 5 core data files: 1) Test result report formulated in accordance with the *Test Outline for Ultra-sensitive MEMS Weak-force Sensors*; 2) Test data, including original csv-format data collected by frequency counters and txt-format reference data obtained by lock-in amplifiers; 3) Collection of charts and graphs, including processing parameters in xlsx format and data such as critical linewidths and etching depths measured by SEM in tiff format; 4) Relevant papers and patent materials. This dataset is applicable to technical research and development in fields such as micro-nano detection and precision mechanical measurement. It can lay a foundation for the application of ultra-sensitive MEMS weak-force sensors in scenarios like mechanical property evaluation of micro-nano materials, and provide referable technical solutions for the testing and calibration of similar force sensors.