Lateral glow discharge ion source for the integrated MEMS quadrupole mass spectrometer

These data contain measurements and characterization results of a a glow discharge ion source specifically designed for integration into a fully MEMS-based quadrupole mass spectrometer. The dataset includes current‑voltage characteristics of the discharge and ion-beam, as well as operation measurements

本数据集包含专为集成至全微机电系统（MEMS）四极杆质谱仪而设计的辉光放电离子源的测量数据与表征结果。本数据集涵盖该辉光放电与离子束的电流-电压特性，以及相关运行测量数据。