超结构电极微纳结构有序设计与高密度热电薄膜图案化加工数据集

该数据集对应课题四研究内容（4），实现超结构电极的微纳有序设计，突破了高密度热电薄膜图案化加工的关键技术难点。实验及表征结果由多种先进设备以及软件获取，包括RDX-6100型X射线衍射仪、SEM sigma300扫描电子显微镜、Keithley2400源表、Pico-YL纳秒光纤激光器、CKG-60型磁控溅射薄膜制备系统、COMSOL软件等设备以及软件。记录观测值包括超结构电极的晶体结构和相组成表征结果，表面形貌及微纳结构、热流调控器件设计与仿真模拟优化结果、高密度热电器件多个不同温差的伏安特性曲线以及输出功率曲线、通过调控激光能量密度、激光扫描速率、激光重复频率、扫描次数等具体参数对材料形貌以及性能的影响、Bi2Te3/Ni/Cu以及Bi2Te3/Ti/Cu多层膜接触电阻测试结果以及在100℃老化10/20/30h时其接触电阻变化值。数据总量约为60MB，内容涵盖图表合集、SCI论文及专利授权文件。该数据集对超结构电极以及高密度热电薄膜加工作广泛而深入的研究，可为高性能超结构电极微纳设计以及高密度热电薄膜图案化加工提供关键研究支撑，为相关领域技术发展奠定基础。

This dataset corresponds to research content (4) of Topic 4, which realizes the micro-nano ordered design of superstructured electrodes and breaks through the key technical bottlenecks in the patterning processing of high-density thermoelectric thin films. The experimental and characterization data are collected using a range of advanced instruments and software, including RDX-6100 X-ray diffractometer, SEM Sigma300 scanning electron microscope, Keithley2400 source meter, Pico-YL nanosecond fiber laser, CKG-60 magnetron sputtering thin film preparation system, COMSOL software and other related instruments and software. The recorded observation contents include: characterization results of crystal structure and phase composition of superstructured electrodes, surface morphology and micro-nano structure; design and simulation optimization results of heat flow regulation devices; current-voltage (I-V) characteristic curves and output power curves of high-density thermoelectric devices under multiple different temperature differences; the effects of specific processing parameters such as laser energy density, laser scanning speed, laser repetition frequency and scanning times on material morphology and performance; contact resistance test results of Bi2Te3/Ni/Cu and Bi2Te3/Ti/Cu multilayer films, as well as the change values of their contact resistance after aging at 100°C for 10, 20 and 30 hours. The total size of the dataset is approximately 60 MB, and its content covers a collection of charts and graphs, SCI papers and patent authorization documents. This dataset conducts extensive and in-depth research on superstructured electrodes and high-density thermoelectric thin film processing, which can provide key research support for the micro-nano design of high-performance superstructured electrodes and the patterning processing of high-density thermoelectric thin films, and lay a solid foundation for the technological development of related fields.