Research Data supporting "Low-temperature Open-atmosphere Growth of WO3 Thin Films with Tunable and High-performance Photoresponse"

Data collection include XRD of the WO3 films on Si substrations with various orientations. SMU data of the photoresponse of the UV-detector device. Dektak profilometry data of different thickness of films deposited to determine the growth rate.

本数据集包含三类实验数据：不同取向硅衬底上沉积的三氧化钨（WO₃）薄膜的X射线衍射（XRD）数据、紫外探测器器件光响应的源测量单元（Source Measure Unit，SMU）测试数据，以及为测定薄膜生长速率而制备的不同厚度薄膜的Dektak轮廓仪测量数据。