Surface Topography Challenge R71 (Dektak) Auburn University Submission

There are 10 line scan raw data files from the Veeco Dektak 150. Five line scans were taken from the South to North directions, and five were taken from the East to West directions. The directions are defined in the write-up in Figure 3. The scans were performed at a speed of 64 seconds per line, yielding a total of 9600 data points across a distance of 1.5 mm. This results in 6.5 data points per micron. The stylus tip has a 2 µm radius.

本数据集包含10份来自Veeco Dektak 150型台阶仪的线扫描原始数据文件。其中5条线扫描沿南北方向开展，剩余5条沿东西方向完成，扫描方向的定义详见图3对应的说明文档。本次扫描的单条线扫描时长为64秒，在1.5毫米的扫描距离内总计采集9600个数据点，对应每微米6.5个数据点。该仪器的探针尖端半径为2 µm。