The data of article "Superconducting nanowire single photon detector with efficiency over 90% at 2 μm wavelength"

We here report a high system detection efficiency (SDE) superconducting single-photon detector (SSPD) at 2 μm wavelength. The device integrates a SiO₂/Ta₂O₅ distributed Bragg reflector (DBR) and a sandwich-structured double-layer NbN nanowire to enhance optical absorption efficiency. A cold development technique is implemented to optimize the superconducting nanowires with sub-40-nm linewidths, thus enhancing intrinsic detection efficiency (IDE). The fabricated SSPD shows an SDE exceeding 90% at 2 μm wavelength. Moreover, the detector allows an operational working temperature of 2.2 K provided by a compact GM cryo-cooler. This detector delivers excellent performance at the 2 μm wavelength, and its optimized structural design implies promising potential for extending detection toward longer infrared bands. It thus holds value for advancing high-sensitivity quantum technologies, mid-infrared optical communications, and dark matter detection research.（A CSV file has been provided containing the plot data for all data charts.）

本研究报道了一款工作于2 μm波段、具备高系统探测效率（system detection efficiency，SDE）的超导单光子探测器（superconducting single-photon detector，SSPD）。该器件集成了SiO₂/Ta₂O₅分布式布拉格反射镜（distributed Bragg reflector，DBR）与三明治结构双层NbN纳米线，以提升光学吸收效率。研究采用冷显影工艺制备出线宽小于40 nm的超导纳米线，进而提升本征探测效率（intrinsic detection efficiency，IDE）。所制备的SSPD在2 μm波段的系统探测效率超过90%。此外，该探测器可通过紧凑型GM低温制冷机实现2.2 K的工作温度。这款探测器在2 μm波段展现出优异性能，其优化后的结构设计为向更长红外波段拓展探测能力提供了可观潜力，因此对于推动高灵敏度量子技术、中红外光通信及暗物质探测等领域的研究具有重要价值。本次研究附带一份CSV文件，涵盖所有数据图表的绘图源数据。