Surface slope measurement of steep silicon V-grooves using high NA Linnik interferometry [Dataset]

This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 440 nm and the step size between every z-step is 20 nm. The measured sample contains several V-groove structures etched into silicon. The structure shown in the corresponding publication is the central V-groove structure.

本数据集包含来自林尼克型相干扫描干涉仪（coherence scanning interferometer）的原始测量数据。本测量使用了两个数值孔径（NA）为0.95的物镜。所有测量采用的波长为440纳米，且每个z步之间的步长为20纳米。被测样品包含多个蚀刻于硅中的V型槽结构（V-groove structure）。对应出版物中展示的结构为中央V型槽结构。