Dataset for Stability of Ultrafast Laser-Induced Stress in Fused Silica and Ultra-Low Expansion Glass

This dataset contains the raw data extracted from Fizeau interferometer measurements of fused silica and ULE wafers undergoing isochronal annealing testing for stress field stability after ultrafast laser stress figuring. The data was collected between December 2024 and June 2025 at the James C. Wyant College of Optical Sciences, University of Arizona, in Tucson, Arizona. The data was analyzed for changes to the first 15 Zernike coefficients occurring between the “Nominal” measurement and subsequent thermal cycles as a simple difference (e.g., value in a “50C” column minus value in the “Nominal” column equals measured change in Zernike term after cycling to 50-degrees Celsius). Induced surface figure changes as a result of ULSF were evaluated as the difference between the “Before ULSF” and “After ULSF” columns for all samples that underwent the ULSF procedure. Additionally, equibiaxial, antibiaxial, and shear stress was calculated after each thermal cycle from the change in the first three Zernike coefficients (Z4-Z6), respectively, using a modified version of Stoney’s equation. These changes were then plotted in the figures and reported in the tables that appear in the article "Stability of Ultrafast Laser-Induced Stress in Fused Silica and Ultra-Low Expansion Glass.”<br><br><br><br><i>For inquiries regarding the contents of this dataset, please contact the Corresponding Author listed in the README.txt file. Administrative inquiries (e.g., removal requests, trouble downloading, etc.) can be directed to [e-mail]</i>

本数据集包含经菲佐干涉仪（Fizeau interferometer）采集的原始测量数据，样本为经超快激光应力修形（ultrafast laser stress figuring，以下简称ULSF）处理后开展等时退火测试、以评估应力场稳定性的熔融石英与ULE晶圆。该数据集于2024年12月至2025年6月间，在美国亚利桑那州图森市亚利桑那大学詹姆斯·C·怀恩特光学科学学院完成采集。

本数据集针对「标称（Nominal）」测量与后续热循环间前15项泽尼克（Zernike）系数的变化开展分析，采用简单差值计算方式（例如，「50°C」列数值减去「Nominal」列数值，即为升温至50摄氏度后泽尼克项的实测变化量）。针对所有经ULSF流程处理的样本，通过比对「ULSF处理前（Before ULSF）」与「ULSF处理后（After ULSF）」列的数值，评估由ULSF诱导产生的表面面形变化。此外，研究团队基于修正版斯通尼公式（Stoney’s equation），分别利用前三项泽尼克系数（Z4-Z6）的变化量，计算得到每一轮热循环后的等双轴应力、反双轴应力与切应力。上述变化量已被绘制成图，并刊载于论文《熔融石英与超低膨胀玻璃中超快激光诱导应力的稳定性》的附表与附图中。

如需咨询本数据集的具体内容，请联系README.txt文件中列明的通讯作者。如需提交行政类咨询（例如数据移除申请、下载故障排查等），请发送邮件至[e-mail]