Computational Data: Design principles of precursors for area-selective atomic layer deposition
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资源简介：
This dataset contains the computational data of Appendix B and C of the Dissertation "Design Principles of Precursors for Area-Selective Atomic Layer Deposition". This includes reaction paths of dimer opening reactions and calculations for a design process of new precursors.
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Zenodo创建时间：
2026-04-10
