FIB cleaned an reshaped Electrostatic Electron Vortex Beam Generators
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https://zenodo.org/record/5873331
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Here are collected the SEM images (top-view and tilted-view) of the Electrostatic Electron Vortex Beam Generators fabricated at the CNR-IMM in Bologna and then cleaned and reshaped by FIB milling at the CNR-NANO in Modena. Different shapes of the main paired needles have been fabricated to try to optimize the reproduction the ideal phase profile as reported in https://doi.org/10.1103/PhysRevResearch.2.013185
本数据集收录了于博洛尼亚的CNR-IMM制备的静电电子涡旋束发生器(Electrostatic Electron Vortex Beam Generators)的扫描电子显微镜(Scanning Electron Microscope, SEM)图像,包含俯视视角与倾斜视角两类图像。该器件后续在摩德纳的CNR-NANO通过聚焦离子束(Focused Ion Beam, FIB)铣削完成清洁与整形处理。
为优化理想相位分布的复现效果,研究人员制备了多种形状的主配对针结构,相关研究成果已发表于https://doi.org/10.1103/PhysRevResearch.2.013185
创建时间:
2024-07-17



