非易失性存储介质先进制备工艺与三维集成数据集

非易失性存储介质先进制备工艺与三维集成数据集主要面向非易失存储介质及其三维集成的先进制备工艺研究建设，基于华中科技大学与长江存储科技有限责任公司的生产设备产生，主要记录了非易失性存储介质三维阵列的制备工艺版图、工艺流程参数等信息，同时包含非易失性存储介质的精确读写理论方法、相关测试的源代码、测试电压的波形数据、测试结果，以及三维阵列的容量测试方法和测试结果的原始数据，阵列的良率测试方法和及测试结果的原始数据，以及非易失存储介质阵列的能效测试方法及测试结果的原始数据。数据量约100MB

This dataset is developed for research on advanced fabrication processes and 3D integration of non-volatile storage media. It is generated based on production equipment from Huazhong University of Science and Technology and Yangtze Memory Technologies Co., Ltd. The dataset mainly records information such as the fabrication process layouts and process parameters of 3D arrays for non-volatile storage media. Additionally, it includes precise theoretical reading and writing methods for non-volatile storage media, source codes of relevant tests, waveform data of test voltages, and test results. Furthermore, it contains raw data of capacity testing methods and results, yield testing methods and results, as well as energy efficiency testing methods and results for the non-volatile storage media arrays. The total data volume is approximately 100 MB.