Data for inner-shell characteristic X-ray yields for thick Al、Ti、Zr、W、Au targets by 5-27 keV electrons

The dataset presented here is supplemental material for our paper that was published in Acta Physica Sinica -Chinese Edition 69 (13) (2020) 133401 by Y.H. Li, et al. The dataset includes our measured inner-shell (K, Kα,β, and Lα,β,γ) characteristic X-ray yields for thick Al、Ti、Zr、W、Au targets by 5-27 keV electron impact. The surfaces of these (semi-infinite) thick targets were polished. The incident electron beam bombarded vertically, and the thick targets were tilted by 45° with respect to the direction of incident electron beam. The X-ray detector was placed horizontally, and the centers of the target and the detector are located in the same horizontal line. Therefore, the X-ray emission angle is 90° with respect to the incident beam direction, as shown in Figure 5 of Acta Physica Sinica -Chinese Edition 69 (13) (2020) 133401 by Y.H. Li, et al.

本数据集为李艺宏（Y.H. Li）等人发表于《物理学报（Acta Physica Sinica -Chinese Edition）》2020年第69卷第13期，文章编号为133401的论文的补充材料。本数据集收录了5~27 keV电子轰击下的实测数据，涉及经抛光处理的半无限厚铝（Al）、钛（Ti）、锆（Zr）、钨（W）、金（Au）靶的内壳层（K、Kα,β及Lα,β,γ）特征X射线产额。上述半无限厚靶的表面均经过抛光处理，入射电子束垂直轰击靶面，且厚靶相对于入射电子束方向倾斜45°；X射线探测器水平放置，靶材与探测器的中心处于同一水平线，因此X射线出射角相对于入射束方向为90°，具体实验布局可参见李艺宏等人上述论文中的图5。