Dataset associated with 'Non-invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films'

This work presents a low-cost non-invasive millimeter-wave surface-height measurement sensor of dielectric and polymer films on glass and quartz substrates. The surface-height profiler utilizes near-field resonance measurement technique operating at 96 GHz implemented by using a single complementary split-ring resonator (CSRR) integrated with a tailor-made WR10 rectangular waveguide. By placing a glass or quartz substrate uniformly coated with SU-8 photoresist on top of the CSRR, the thickness of the SU-8 polymer can be extracted based on the reflected and transmitted electromagnetic-wave energy interacting at the electrical boundary between the substrate and polymer film. Uniform single layers of SU-8 polymer with thicknesses from 3 to 13 μm, coated on top of glass substrate are measured and characterized. The extracted polymer-film thicknesses from the sensor in this work show an agreement of higher than 95% as compared to the commercial surface profiler instrument, while offering various advantages e.g. non-invasion, ease of measurement setup, low-cost and miniaturization.

本研究提出了一种低成本、非侵入式的毫米波表面高度测量传感器，用于检测玻璃和石英基底上的介电薄膜与聚合物薄膜。该表面高度轮廓仪采用工作于96 GHz的近场共振测量技术，其核心为集成了定制WR10矩形波导的单个互补开口环谐振器（CSRR）。将均匀涂覆有SU-8光刻胶的玻璃或石英基底放置于CSRR上方，即可基于基底与聚合物薄膜之间电边界处相互作用的反射及透射电磁波能量，提取SU-8聚合物的厚度。本研究对玻璃基底上涂覆的厚度范围为3至13 μm的均匀SU-8聚合物单层进行了测量与表征。与商用表面轮廓仪相比，本传感器提取的聚合物薄膜厚度一致性高于95%，同时具备非侵入性、测量装置简易、低成本及小型化等多重优势。