高可靠温压一体化传感器数据集

针对数字液压阀多状态信息的高精度和高可靠感知需求，研究了温压一体化传感器，为数字液压阀的性能调控提供精确温度和压力信息；数据主要内容包括基于压阻式压力感知原理建立了敏感元件结构模型，设计了微型传感器基座结构，研究了基于专用调理芯片的多项式拟合温度补偿算法与补偿电路，进行了第三方检测来验证所研制传感器的有效性。

Aiming at the requirements of high-precision and high-reliability sensing of multi-state information for digital hydraulic valves, this study developed an integrated temperature and pressure sensor to provide accurate temperature and pressure information for the performance regulation of digital hydraulic valves. The main contents of this dataset include: establishing a structural model of the sensing element based on the piezoresistive pressure sensing principle, designing a micro-scale sensor base structure, researching polynomial fitting temperature compensation algorithms and compensation circuits based on dedicated conditioning chips, and conducting third-party testing to verify the effectiveness of the developed sensor.