Cr-Al-O-N thin film SEM surface microstructure images

This dataset contains SEM surface microstructure images of Cr-Al-O-N thin films that were deposited by sputter deposition for a variation of process parameters and chemical composition. The CSV-file contains chemical composition and sputter deposition process data for the individual SEM images. The image scale is 0.538 pixels/nm. For further information view the related publication.

本数据集包含通过溅射沉积（sputter deposition）法制备的Cr-Al-O-N薄膜的扫描电子显微镜（Scanning Electron Microscope, SEM）表面微观结构图像，制备过程中涵盖了不同工艺参数与化学成分的样品。配套的CSV文件包含对应每一张SEM图像的化学成分及溅射沉积工艺参数数据。图像标尺为0.538像素/纳米。如需进一步了解相关信息，请查阅相关学术出版物。