磁控溅射TaSilicon样品材料表征数据
收藏国家基础学科公共科学数据中心2024-03-05 收录
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https://www.nbsdc.cn/general/dataDetail?id=64ef85b8bb16e0591d025ab1&type=1
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资源简介：
该数据集包含的数据主要是通过多种材料表征手段（原子力显微分析、X射线衍射）表征通过磁控溅射的方式在硅衬底上制备的高品质铝薄膜特性，通过该数据集可以指导对材料生长过程中参数的优化，提升材料品质，为将来更大尺寸高品质样品的生长积累数据经验。
This dataset mainly consists of data characterizing the properties of high-quality aluminum thin films prepared via magnetron sputtering on silicon substrates, which were obtained through multiple material characterization techniques including Atomic Force Microscopy (AFM) and X-ray Diffraction (XRD). This dataset can be used to guide the optimization of process parameters during material growth, improve the quality of the materials, and accumulate empirical data and experience for the growth of larger-sized high-quality samples in future research.
提供机构：
中国科学技术大学
