TECHNOLOGICAL EQUIPMENT FOR OBTAINING METAL COATINGS BY DECOMPOSING METALORGANIC COMPOUNDS WITH CVD METHOD

The paper presents proposals to apply a method of chemical gas-phase deposition of metals (CVD-method) in agricultural engineering for obtaining wear-proof and corrosion-resistant coatings. The authors provide basic information containing is a detailed description of the equipment, new methods of applying coatings and technological modes, as well as give overview information on the method of chemical gas-phase deposition. The paper describes new technological equipment for the implementation of chemical gas-phase metal deposition by decomposition of metalorganic compounds (MOC) in a liquid or a solid phase. Two main methods of the MOC input into the reaction chamber (for liquid and solid MOC) are considered. The authors present a block diagram and photographs of the installation allowing to get a complete picture of the process and show a commercially available installation for applying PVD coatings that is modified and adapted to chemical gas-phase deposition processes. They also offer the most promising areas for using the CVD-method of MOС decomposing in industrial production and present a list of the most promising areas of utilizing MOC in industrial production indicating the technological modes of their decomposition.

本论文提出将金属化学气相沉积法（Chemical Vapor Deposition，CVD）应用于农业工程领域以制备耐磨耐腐蚀涂层的方案。作者提供了基础资料，其中包含设备的详细说明、新型涂层制备工艺与技术参数，同时也对化学气相沉积法进行了概述性介绍。本论文阐述了通过液相或固相金属有机化合物（Metalorganic Compounds，MOC）分解来实现金属化学气相沉积的新型工艺设备。研究了将MOC送入反应腔的两种主要方式（分别对应液相与固相MOC）。作者给出了该装置的框图与实物照片，可帮助读者完整了解该工艺过程；同时展示了一款经过改造以适配化学气相沉积工艺的商用物理气相沉积（Physical Vapor Deposition，PVD）涂层制备装置。此外，作者还提出了MOC分解CVD法在工业生产中的高潜力应用方向，并列出了工业生产中利用MOC的高潜力应用场景，同时标注了其分解所需的工艺参数。