Surface measurement data of polished LTCC: Characterization of pores in polished low temperature co-fired glass-ceramic composites for optimization of their micromachining

Pores are intrinsic defects of ceramic composites and influence their functional properties significantly. Their characterization is therefore a pivotal task in material and process optimization. It is demonstrated that polished section analysis allows for obtaining precise information on pore size, shape, area fraction, and homogeneous distribution. It is proven that laser scanning microscopy provides accurate height maps and is thus an appropriate technique for assessing surface features. Such data is used to compare areas with good and poor polishing results, and various surface parameters are evaluated in terms of their informative value and data processing effort. The material under investigation is a low-temperature co-fired ceramic composite. Through statistical analysis of the data, the inclination angle was identified as an appropriate parameter to describe the polishing result. By using masked data, direct conclusions can be drawn about the leveling of load-bearing surface are..., The data set contains raw data of the polished surface of LTCC substrates and compares good and bad polishing conditions. The data set is obtained by laser scanning microscopy. , You will find the assignment of the measurements in the README file. Related scripts are provided on GitHub and linked in this document too.孔隙是陶瓷复合材料的固有缺陷，对其功能性能具有显著影响。因此，孔隙表征是材料与工艺优化中的关键任务。研究表明，抛光截面分析可获取孔隙尺寸、形状、面积分数及均匀分布的精确信息。研究证实，激光扫描显微镜能提供精准的高度图，因此是评估表面特征的合适技术。此类数据用于对比抛光效果优劣的区域，并从信息价值与数据处理工作量两方面评估多种表面参数。研究对象为低温共烧陶瓷复合材料（low-temperature co-fired ceramic composite）。通过对数据的统计分析，倾斜角被确定为描述抛光效果的合适参数。通过使用掩膜数据，可直接得出关于承载表面平整度的结论……该数据集包含低温共烧陶瓷（LTCC）基板抛光表面的原始数据，并对比了抛光条件的优劣。数据集通过激光扫描显微镜获取。测量数据的分配信息可在README文件中找到。相关脚本已在GitHub上提供，并在本文档中附有链接。