Data from: Hydrothermally synthesized PZT film grown in highly concentrated KOH solution with large electromechanical coupling coefficient for resonator

This paper presents a study of lead zirconate titanate (PZT) films hydrothermally grown on a dome-shaped titanium diaphragm. Few articles in the literature address the implementation of hydrothermal PZT films on curved-diaphragm substrates for resonators. In this study, a 50-μm-thick titanium sheet is embossed using balls of designed dimensions to shape a dome-shaped cavity array. Through single-process hydrothermal synthesis, PZT films are grown on both sides of the processed titanium diaphragm with good adhesion and uniformity. The hydrothermal synthesis process involves a high concentration of potassium hydroxide solution and excess amounts of lead acetate and zirconium oxychloride octahydrate. Varied deposition times and temperatures of PZT films are investigated. The grown films are characterized by X-ray diffraction and scanning electron microscopy. The 10-μm-thick PZT dome-shaped resonators with 60- and 20-μm-thick supporting layers are implemented and further tested. Results for both resonators indicate that large electromechanical coupling coefficients and a series resonance of 95 MHz from 14 MHz can be attained. The device is connected to a complementary metal–oxide–semiconductor integrated circuit for analysis of oscillator applications. The oscillator reaches a Q value of 6300 in air. The resonator exhibits a better sensing stability when loaded with water when compared with air.

本文针对在穹顶形钛膜片上水热生长的锆钛酸铅（PZT）薄膜展开研究。当前文献中鲜有报道将水热法制备的PZT薄膜应用于曲面基底谐振器的相关研究。本研究采用定制尺寸钢球对50μm厚的钛板进行压花成型，制备出带有穹顶形腔阵列的钛膜片。通过单步水热合成工艺，在处理后的钛膜片两侧生长出PZT薄膜，所得薄膜附着力优良且均匀性佳。该水热合成工艺采用高浓度氢氧化钾溶液，以及过量的乙酸铅和八水氧氯化锆。本研究探究了不同沉积时间与沉积温度对PZT薄膜的影响。通过X射线衍射与扫描电子显微镜对生长得到的薄膜进行表征。随后制备了厚度为10μm的PZT穹顶形谐振器，其支撑层厚度分别为60μm和20μm，并对其开展测试。两款谐振器的测试结果均表明，其可实现较高的机电耦合系数，串联谐振频率覆盖14MHz至95MHz区间。将该器件与互补金属氧化物半导体集成电路相连，用于振荡器应用的性能分析，该振荡器在空气中的品质因数可达6300。相较于空气环境，该谐振器在负载水时展现出更优的传感稳定性。