Data and scripts associated with "Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards"
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https://data.nist.gov/od/id/mds2-2975
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资源简介：
Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV. Scripts for processing this data. Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra.
