MILLING A MULTI-LAYERED OBJECT

A miller， a non-transitory computer readable medium， and a method for milling a multi-layered object. The method may include (i) receiving or determining milling parameters related to a milling process， the milling parameters may include at least two out of (a) a defocus strength， (b) a duration of the milling process， (c) a bias voltage supplied to an objective lens during the milling process， (d) an ion beam energy， and (e) an ion beam current density， and (ii) forming a crater by applying the milling process while maintaining the milling parameters， wherein the applying of the milling process includes directing a defocused ion beam on the multi-layered object.

本数据集涵盖一种离子铣削装置、一种非暂态计算机可读存储介质（non-transitory computer readable medium），以及一种用于对多层物体进行铣削加工的方法。该方法可包含以下步骤：(i) 获取或确定与铣削加工过程相关的铣削参数，所述铣削参数至少包含(a)至(e)所列选项中的两项：(a) 散焦强度（defocus strength），(b) 铣削过程时长，(c) 铣削过程中施加于物镜的偏置电压，(d) 离子束能量（ion beam energy），(e) 离子束电流密度（ion beam current density）；(ii) 在维持上述铣削参数的前提下执行铣削加工以形成凹坑，其中所述铣削加工的执行过程包括将散焦离子束（defocused ion beam）照射至所述多层物体表面。