AFM images of interdigitated ITO electrodes with thin film of POM deposited

A Digital Instruments Multimode-8 with a NanoScope V controller and E scanners (Bruker) was used for acquiring AFM images. The AFM data were analysed with NanoScope Analysis 1.50 software (Bruker). The AFM was operated in tapping mode. An isolation table (Veeco Inc., Metrology Group) was used to minimise vibrational noise. Aluminium-coated silicon tips on silicon cantilevers (Tap300Al-G, BudgetSensors) were used for imaging. The nominal tip curvature radius was approximately <10 nm, resonant frequency ~300 kHz and spring constant k ~ 40 Nm-1. The film thickness was measured by using the AFM tip at a strong force in contact mode to scratch away a 1 µm2 area of the of the film (aspect ratio 20:1), exposing the glass underneath. A new tip was then used to image the area in tapping mode over the scratch to measure the height in the z-direction of the film.

本研究采用布鲁克（Bruker）公司生产的搭载NanoScope V控制器与E型扫描仪的Digital Instruments Multimode-8型原子力显微镜（Atomic Force Microscope，AFM）采集AFM图像。AFM数据通过NanoScope Analysis 1.50软件（布鲁克（Bruker）公司）进行分析。该AFM以轻敲模式（tapping mode）运行。实验使用维易科公司（Veeco Inc.）计量集团（Metrology Group）生产的隔振台以最大限度降低振动噪声。成像采用硅悬臂梁上镀铝的硅探针（Tap300Al-G，BudgetSensors），该探针的标称曲率半径约小于10 nm，谐振频率约为300 kHz，弹簧常数k约为40 N·m⁻¹。薄膜厚度的测量方式如下：以强接触模式下的AFM探针刮除薄膜上一块长宽比为20:1的1 µm²区域，暴露出下方的玻璃基底；随后更换新探针，在该刮痕区域以轻敲模式成像，以测量薄膜在z方向的高度。