SICG (Francesca)

<p>The epitaxial graphene furnace is a customized graphite hot-zone furnace with the capability to be heated up to 2500 ?. The work zone in the chamber is <em>4&#216;&#215;6h</em>&nbsp;(inch), enabling to grow samples with different sizes from 5 mm square to 4 inch wafer in different customized crucibles. The chamber exhaust includes a rotary vane pump and diffusion pump, allowing the ultimate vacuum in the chamber to reach 10^-6 Torr at room temperature. &nbsp;With the home-built gaslines and pressure controlling system, argon as carrier gas and H₂ &amp; CH₄ as precursors are introduced into the system. The operation pressure in the chamber ranges form 1 to 1000 Torr.</p>

外延石墨烯炉（epitaxial graphene furnace）是一款定制化石墨热区炉，最高加热温度可达2500 ℃。其炉腔工作区尺寸为4英寸（直径）×6英寸（长度），可配合不同定制坩埚，生长尺寸范围从5毫米见方到4英寸晶圆的样品。炉腔排气系统配备旋片泵（rotary vane pump）与扩散泵（diffusion pump），可在室温下使炉腔极限真空度达到10⁻⁶托。本系统搭载自研气路与压力控制系统，可通入氩气作为载气，以及氢气（H₂）与甲烷（CH₄）作为反应前驱体；炉腔工作压力范围为1至1000托。