Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 100 Celsius degrees

Application of a microsphere-based fiber-optic sensor with 100 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor head in real-time, which allows for higher accuracy during measurements. The study has demonstrated that ZnO ALD coated microsphere-based sensors can be successfully used for temperature measurements.

本文介绍了一种通过原子层沉积（Atomic Layer Deposition，ALD）法制备100纳米氧化锌（ZnO）涂层的基于微球的光纤传感器，并阐述其在100℃至300℃温度区间内的温度测量应用。将光纤微球与传感装置集成的主要优势在于，可实时监测传感器探头的完整性，进而提升测量过程中的精度水平。本研究证实，经ALD法包覆ZnO涂层的基于微球的光纤传感器可成功应用于温度测量场景。