蓝宝石增透微结构及性能数据集

This data set includes the structural parameters of anti-reflective microstructures and anti-reflective films prepared on sapphire, as well as the transmittance test, temperature rise test and beam quality factor test of the prepared samples. The influence of depth, bottom angle, period and top duty ratio of one-dimensional trapezoidal structure on transmittance is analyzed by using COMSOL software, and the process tolerance of microstructure is given. The simulation design of anti-reflection film system is carried out by using TFCalc software. After the sample preparation, the transmittance test is carried out. At the same time, in order to meet the application environment, the temperature rise of the antireflective sample under the action of high power laser is tested, and the change of the beam quality factor of the probe light passing through the sample at different temperatures is tested.

本数据集涵盖了蓝宝石衬底上制备的抗反射微结构与抗反射薄膜的结构参数，以及所制备样品的透射率测试、温升测试与光束质量因子测试结果。采用COMSOL软件分析了一维梯形结构的深度、底角、周期及顶部占空比对透射率的影响，并给出了微结构的工艺容差。借助TFCalc软件开展了抗反射薄膜体系的仿真设计。样品制备完成后，首先开展透射率测试；同时，为适配实际应用环境，还测试了抗反射样品在高功率激光作用下的温升特性，以及不同温度下穿过样品的探测光的光束质量因子变化情况。