Kinematic scattering in the nanodiffraction limit: Experimental testing on a model system

Diffraction from ultra-thin single crystal films is predicted to deviate from what is usually known for bulk materials. For example, the position, integrated intensity and integral breadth of a diffraction peak cannot be related to the lattice spacing of the material or the number of unit cells along the diffraction vector. These predictions bear important consequences for the analysis of diffraction patterns from nanocrystals. They have not yet been confronted to experimental measurements performed on simple model systems. The aim of this proposed experiment is to investigate in detail the diffraction patterns from very clean ultrathin SOI films and confront these results to kinematic scattering calculations taking into account all nanodiffarction artefacts.

超薄单晶薄膜的衍射行为，相较于块体材料的经典衍射规律，将产生偏离。例如，衍射峰的位置、积分强度与积分宽度，均无法与材料的晶格间距或沿衍射矢量方向的晶胞数目建立关联。此类预测对纳米晶体衍射图样的分析具有重要意义，但目前尚未通过基于简单模型体系的实验测量对其进行验证。本拟开展实验的目标，是对超洁净超薄绝缘体上硅（SOI）薄膜的衍射图样展开详细研究，并将实验结果与考虑了全部纳米衍射伪影的运动学散射计算结果进行对照验证。