Surface Topography Challenge R58 (Dektak) Auburn University Submission

There are 10 line scan raw data files from the Veeco Dektak 150. Five line scans were taken from the South to North directions, and five were taken from the East to West directions. The directions are defined in the write-up in Figure 3. The scans were performed at a speed of 64 seconds per line, yielding a total of 9600 data points across a distance of 1.5 mm. This results in 6.5 data points per micron. The stylus tip has a 2 µm radius.

本数据集包含10份Veeco Dektak 150型轮廓仪生成的线扫描原始数据文件，其中5条扫描线沿南-北方向采集，剩余5条沿东-西方向采集。扫描方向的定义详见图3的配套说明文档。本次扫描单条线的采集时长为64秒，在1.5毫米的扫描范围内共采集得到9600个数据点，经换算每微米对应6.5个数据点。该轮廓仪的探针尖端半径为2 µm。