Data for: "Increasing MEMS micromirror line-scan rates through 3D-printed micro-optics"

The dataset contains raw data and a Jupyter notebook file that shows the generation of the data figures in the associated conference paper detailing a scan enhancement unit using a MEMS scanner and 3D-printed lens array. The raw files consist of .csv files of: - Measurements of the MEMS angular response (these were done using a laser beam reflected of the MEMS mirror onto a screen) - Measurements of the surface profile of the 3D-printed cylinrical lens array (using a Tencor AlphaStep stylus profiler with the readout of a single height profile line along the array) - Measurements of the scan line moving accross a fast photodiode (with the photodiode located at the centre of the scan line showing the amplification of the scan number with using multiple lenses of the array)

本数据集包含原始数据与一份Jupyter Notebook文件，该文件可复现关联会议论文中配套数据图的生成过程，该论文围绕一款集成微机电系统（Micro-Electro-Mechanical Systems，MEMS）扫描镜与3D打印透镜阵列的扫描增强单元展开研究。原始数据文件均为.csv格式，包含以下三类测量数据：
1. MEMS角响应测量数据：本次实验采用激光束经MEMS反射镜反射至屏幕的方式完成测量；
2. 3D打印圆柱透镜阵列的表面轮廓测量数据：采用Tencor AlphaStep触针式轮廓仪进行测量，采集沿阵列分布的单条高度轮廓线的读数数据；
3. 扫描线扫过快速光电二极管的测量数据：光电二极管位于扫描线中心位置，该数据可体现使用阵列中多块透镜时扫描信号的放大效果。