Dataset for "Guided acoustic waves in thin epitaxial films: experiment and inverse problem solution for NiTi"

This dataset contains data about the epitaxial NiTi film that was used in the publication "Guided acoustic waves in thin epitaxial films: experiment and inverse problem solution for NiTi". It contains the SEM, AFM, FIB and R(T) data used to characterize the film.

本数据集包含用于发表于论文《薄外延薄膜中的导声波：镍钛的实验与反问题求解》（Guided acoustic waves in thin epitaxial films: experiment and inverse problem solution for NiTi）的外延镍钛（NiTi）薄膜相关数据。数据集包含用于表征该薄膜的扫描电子显微镜（SEM，Scanning Electron Microscope）、原子力显微镜（AFM，Atomic Force Microscope）、聚焦离子束（FIB，Focused Ion Beam）以及电阻-温度（R(T)）测试数据。