Dataset suporting journal article "Robust optical picometrology through data diversity"

This dataset supports the publication: Robust Optical Picometrology Through Data Diversity by Cheng-Hung Chi, Eric Plum, Nikolay I. Zheludev, and Kevin F. MacDonald
in JOURNAL: Optical Materials Express

The file contains data for optically measured vs. actual displacement values and corresponding std. dev. values (exemplified in Figs. 3a-c and 4a-c, from which Figs. 3d-e, 4d-e, 5, and S2 are derived).
[Figures 1, 2, and S1 are schematic diagrams]

The project was sponsored by:
Next Generation Metrology Driven by Nanophotonics
EPSRC EP/T02643X/1

Dataset available under a CC BY 4.0 licence

本数据集支撑以下发表成果：论文《通过数据多样性实现稳健光学皮米测量》（Robust Optical Picometrology Through Data Diversity），作者为Cheng-Hung Chi、Eric Plum、Nikolay I. Zheludev及Kevin F. MacDonald，发表于期刊《光学材料快报》（Optical Materials Express）。
本文件包含光学测量位移值与实际位移值的对比数据，以及对应的标准差（standard deviation, std. dev.）。相关数据示例见于图3a-c与图4a-c，图3d-e、图4d-e、图5及补充材料图S2均由该组数据衍生而来。[图1、图2及补充材料图S1为示意图]
本项目受以下项目资助：纳米光子学驱动的下一代计量学（Next Generation Metrology Driven by Nanophotonics），英国工程与物理科学研究委员会（EPSRC）项目编号EP/T02643X/1。
本数据集采用CC BY 4.0许可协议发布。