Dataset for the publication "Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements"

High-speed tactile roughness measurements set high demand on the trackability of the stylus probe. Because of the features of low mass, low probing force, and high signal linearity, the piezoresistive silicon microprobe is a hopeful candidate for high-speed roughness measurements. This paper investigates the trackability of these microprobes through building a theoretical dynamic model, measuring their resonant response, and performing tip-flight experiments on surfaces with sharp variations. Two microprobes are investigated and compared: one with an integrated silicon tip and one with a diamond tip glued to the end of the cantilever. The result indicates that the microprobe with the silicon tip has high trackability for measurements up to traverse speeds of 10 mm/s, while the resonant response of the microprobe with diamond tip needs to be improved for the application in high-speed topography measurements.

高速触觉粗糙度测量对触针探头（stylus probe）的跟踪性能提出了极高要求。压阻式硅基微探针（piezoresistive silicon microprobe）凭借低质量、低探测力与高信号线性度的特性，成为高速粗糙度测量领域极具潜力的候选方案。本文通过构建理论动力学模型、测量其谐振响应，并在具有剧烈轮廓变化的表面上开展针尖飞离实验，系统研究了这类微探针的跟踪性能。本次研究共对比两款微探针：一款为集成式硅基针尖微探针，另一款为在悬臂梁（cantilever）末端粘接金刚石针尖的微探针。实验结果表明，集成硅基针尖的微探针在最高10 mm/s的扫描速度下仍具备优异的跟踪性能；而粘接金刚石针尖的微探针，其谐振响应特性仍需优化，方可适配高速形貌测量（topography measurements）的应用需求。