与光探测器单片集成的InP微透镜的仿真制备数据
收藏国家基础学科公共科学数据中心2024-03-05 收录
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https://www.nbsdc.cn/general/dataDetail?id=64edc527bb16e07753c33960&type=1
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资源简介：
基于光电集成的发展方向，通过调研文献，合理建立仿真模型，进行实验制备，仿真数据通过COMSOL软件仿真得到，使用ICP进行实验制备。
Based on the development direction of optoelectronic integration, a reasonable simulation model was established through literature review, and experimental preparation was conducted. The simulation data was obtained via COMSOL software simulation, while inductively coupled plasma (ICP) was employed for the experimental preparation.
提供机构：
河北华美光电子有限公司
