Nonlinear optimization of thermal effects in plasma processing based on dwell time and sliding distance
收藏科学数据银行2023-07-24 更新2026-04-23 收录
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资源简介：
Nonlinear optimization of thermal effects in plasma processing based on dwell time and sliding distance, relevant simulation data and surface data
提供机构：
Shanghai Institute of Optics and Fine Mechanics
创建时间：
2023-07-24
