Dataset accompanying the publication: "Multi-beam coherent Fourier scatterometry"

Authors (publication): Sarika Soman, Roland C. Horsten, Thomas Scholte, Silvania F. Pereira<br>This dataset contains raw and processed experimental data and the helper functions used to support the findings in the publication “Multi-beam coherent Fourier scatterometry”. The data was collected as part of a study on scan throughput improvement using a parallel multi-probe scanning strategy for optical metrology applications. It includes coherent Fourier scatterometry (CFS) measurements of particle detection, calibration data for etched pits, scripts used for data processing and the FDTD simulations used to support the findings. The dataset is organised to ensure reproducibility and reuse, and can be applied to related research in nanoscale surface inspection.