Achieving high-accuracy and noise-robust process window analysis through stepwise regression
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This dataset contains the raw data used for the publication: Achieving high-accuracy and noise-robust process window analysis through stepwise regression By Fuxun Chen,a Zeyang Chen,a Chaoyi Zheng,a Dong Ni,a Dawei Gao,a,b Guodong Zhou,a,c,* a College of Integrated Circuits, Zhejiang University, No. 2118, Pinglan Road, Xiaoshan District, Hangzhou, China b Zhejiang ICsprout Semiconductor Co., Ltd, No. 2118, Pinglan Road, Xiaoshan District, Hangzhou, China c ZJU-Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, No. 2118, Pinglan Road, Xiaoshan District, Hangzhou, China *Guodong Zhou, E-mail: gdzhou@zju.edu.cn
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Zenodo创建时间：
2025-02-06
