Data repository for "Extreme Ultraviolet induced reactions of tin-oxo cage photoresists"
收藏DataCite Commons2026-02-05 更新2026-05-07 收录
下载链接：
https://uvaauas.figshare.com/articles/dataset/Data_repository_for_Extreme_Ultraviolet_induced_reactions_of_tin-oxo_cage_photoresists_/30651692
下载链接
链接失效反馈官方服务：
资源简介：
Data repository for "Extreme Ultraviolet induced reactions of tin-oxo cage photoresists" by Najmeh Sadegh, Jarich Haitjema, Yu Zhang, Lianjia Wu, Olivier Lugier, Ivan Bespalov, Dimitrios Kazazis,<sup> </sup>Michaela Vockenhuber, Yasin Ekinci, Katharina Witte, Benjamin Watts, Ivan Pollentier, Danilo De Simone, Albert M. Brouwer<i>Journal of Materials Chemistry C</i>, 2026, DOI: 10.1039/D5TC04167HAvailable data are organized according to the figures in the publication. Each folder inside the folder <i>Data in f</i><i>igures</i> contains the data that can be used to reproduce each of the individual figures. The excel file <i>RGA_spectra_TinOH_TinF.xlsx</i> is used for Figures 5, S7 and S9. The xyz files in folder <i>xyz structure files</i> correspond to the energy data in Table S3.
提供机构：
University of Amsterdam / Amsterdam University of Applied Sciences
创建时间：
2025-11-18
