Evidence for layered growth of „100... textured diamond films

The growth of diamond films synthesized by the hot filament chemical vapor deposition method has been studied by scanning tunneling microscopy ͑STM͒. The smooth ͑100͒ faces of micron-sized diamond crystallites were found to exhibit pyramidal shaped architecture at the nano level. The STM data for chemical vapor deposited diamond is analyzed in the light of recently developed dynamical scaling approach. The value of the scaling exponent ␣ Х0.85 signifies a growth primarily driven by the transport of reacting species on the surface rather than molecular diffusion in gas phase.

本研究采用扫描隧道显微镜（scanning tunneling microscopy, STM）对热丝化学气相沉积法（hot filament chemical vapor deposition）制备的金刚石薄膜的生长行为展开了系统性研究。研究发现，微米尺度金刚石微晶的光滑(100)晶面在纳米层级上呈现出金字塔形构筑结构。本研究基于新近提出的动态标度分析法，对化学气相沉积金刚石的STM测试数据进行了分析。结果表明，标度指数α约为0.85，说明该生长过程主要由反应物在表面的输运过程主导，而非气相中的分子扩散机制。