Supporting information to derive the figures of the paper: "Wafer-scale low-disorder 2DEG in 28Si/SiGe without an epitaxial Si cap"

The data sets provide the necessary information to derive the figures of the paper "Wafer-scale low-disorder 2DEG in 28Si/SiGe without an epitaxial Si cap" Preprint at https://arxiv.org/abs/2202.08090

本数据集提供了推导论文《无外延硅覆盖层的28Si/SiGe中晶圆级低无序二维电子气（two-dimensional electron gas，2DEG）》相关图表所需的必要信息，该论文的预印本链接为https://arxiv.org/abs/2202.08090。