Dataset for 'Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement'
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下载链接：
https://zenodo.org/record/10365871
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资源简介：
The original measurement data shown in Figures 1 to 3 of the Euspen conference publication: Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement, https://www.euspen.eu/knowledge-base/ICE23170.pdf.
Acknowledgements
The authors would like to thank the UKRI Research England Development (RED) Fund for funding this work via the Midlands Centre for Data-Drive Metrology. This work was supported by the European Metrology Programme for Innovation and Research (EMPIR) project (TracOptic, 20IND07) and the European Union (ERC, AI-SURF, 101054454).
创建时间：
2023-12-12
