Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties
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https://rodare.hzdr.de/record/321
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资源简介:
Data to ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy
提供机构:
Rodare
创建时间:
2020-05-11



