激光束偏离猫眼中心时对激光追踪测量结果的影响实验数据

本研究通过所建立的模型，探讨了在初始测量位置的猫眼中心入射光的偏差对激光追踪测量光学系统测量精度的影响。以SIOS-SP 2000D激光干涉仪为光源，猫眼固定在P-561.3CD PI Mars XYZ纳米定位平台上，激光干涉仪固定在光学实验平台上。当纳米定位系统沿激光束垂直方向运动时，记录激光干涉仪的测量结果。共采集9组数据，每组21个数据值，数据量为9.79KB。

This study employs the developed model to examine the effect of incident light deviation at the cat's-eye center at the initial measurement position on the measurement accuracy of a laser tracking optical measurement system. A SIOS-SP 2000D laser interferometer served as the light source. The cat's-eye retroreflector was fixed onto a P-561.3CD PI Mars XYZ nano-positioning stage, while the laser interferometer was mounted on an optical experimental table. When the nano-positioning system travels perpendicular to the laser beam, the measurement outputs of the laser interferometer are recorded. In total, 9 datasets were collected, with 21 data points per dataset, and the total data volume is 9.79 KB.