Data of geometric error analysis for closed-loop metrology SPMs
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https://data.mendeley.com/datasets/nrv2dsmhrw
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资源简介：
This data is used to perform geometrical error modeling from volumetric errors and surface geometry. The geometricl error model can be further used to compensate for the error occurs in dynamic mode scaning probe microscopes.
创建时间：
2021-05-28
