Deposition rate of nanoparticles for different sputtering conditions
收藏DataCite Commons2025-09-10 更新2025-09-08 收录
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https://figshare.com/articles/dataset/Depoosition_rate_of_nanooparrticles_forr_diferent_sputtering_coonditions/29094950
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资源简介：
Deposition rate for different pressure values at frequency = 1000 Hz and mean power P = 40 W. Deposition rate for different mean power at pressure of 20 Pa and pulse length of 50 µs. Deposition rate for different frequencies at a pressure of 20 Pa and a mean power of 40 W
提供机构：
figshare
创建时间：
2025-05-19
