Dataset for 'Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement'

Name: Dataset for 'Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement'
Creator: Zenodo
Published: 2023-12-12T17:59:51+08:00

Zenodo2023-12-12 更新2026-05-26 收录

数据链接：

https://zenodo.org/doi/10.5281/zenodo.10365872 数据链接链接失效反馈

官方服务：

资源简介：

The original measurement data shown in Figures 1 to 3 of the Euspen conference publication: Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement, https://www.euspen.eu/knowledge-base/ICE23170.pdf. Acknowledgements The authors would like to thank the UKRI Research England Development (RED) Fund for funding this work via the Midlands Centre for Data-Drive Metrology. This work was supported by the European Metrology Programme for Innovation and Research (EMPIR) project (TracOptic, 20IND07) and the European Union (ERC, AI-SURF, 101054454).

提供机构：

Zenodo

创建时间：

2023-12-12