Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step
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https://eprints.soton.ac.uk/id/eprint/416243
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Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process stepFig. 2 Lapped and polished rib PPLN waveguide
The black dashed line shows the area where surface roughness was measured
using a Zemetrics Zescope white light interferometer. Polynomial levelling
was applied to each 11 × 6 μm2 area before roughness values were
calculated.Fig. 3 Ductile dicing of ridge PPLN waveguide with resin bonded blade
The black dashed line shows the area where surface roughness was measured
using a Zemetrics Zescope white light interferometer. Polynomial levelling
was applied to each 11 × 6 μm2 area before roughness values were
calculated.Fig. 4 Ductile dicing of rib PPLN waveguide with nickel bonded blade
The black dashed line shows the area where surface roughness was measured
using a Zemetrics Zescope white light interferometer. Polynomial levelling
was applied to each 11 × 6 μm2 area before roughness values were
calculated.
提供机构：
University of Southampton
创建时间：
2018-10-16
