Relative effects of pulsed laser deposition parameters on thin film stoichiometry

This is a spreadsheet for exploring the relative effects of ablation, plume expansion, and material condensation during the pulsed laser deposition of thin films. An ablation volume at the target material surface is considered with an area defined by the incident laser beam area and a thickness defined by the laser penetration depth. The spreadsheet is associated with a presentation at the 2022 International Conference on Metallurgical Coatings and Thin Films on the "Relative Effects of Pulsed Laser Deposition Parameters on the Stoichiometry of Thin Films," and with the conference paper to be published in Thin Solid Films.

本数据表旨在探究脉冲激光沉积薄膜过程中消融、气团扩散和材料凝结的相对影响。其中，考虑了靶材表面上的消融体积，其面积由入射激光束面积决定，厚度由激光穿透深度确定。该数据表与2022年国际冶金涂层与薄膜会议上的展示相关，该展示主题为‘脉冲激光沉积参数对薄膜化学计量比相对影响’，并且与即将在《薄膜固体》期刊上发表的会议论文相配套。