Experimental and simulation study of 1D silicon nanowire transistors using heavily doped channels

Silicon nanowires have numerous potential applications, including transistors, memories, photovoltaics, biosensors and qubits [1]. Fabricating a nanowire with the required characteristics for a specific application, however, poses some challenges. For example, a major challenge is that, as the transistors dimensions are reduced, it is difficult to maintain a low off-current (Ioff) whilst simultaneously maintaining a high on-current (Ion). Some sources of this parasitic leakage current include quantum mechanical tunnelling, short channel effects and statistical variability [2, 3]. A variety of new architectures, including ultra-thin silicon-on-insulator (SOI), double gate, FinFETs, tri-gate, junctionless and gate all-around (GAA) nanowire transistors, have therefore been developed to improve the electrostatic control of the conducting channel. This is essential since a low Ioff implies low static power dissipation and it will therefore improve power management in the multi-billion transistors circuits employed globally in microprocessors, sensors and memories.