Dataset for publication: Medium-Entropy Ti-Zr-Nb Thin Films Prepared by Magnetron Sputtering: Structural TEM Study

This dataset accompanies the conference paper and contains two composite figures documenting the structural characterization of a partially crystallized TiNbZr thin film. The figures include representative TEM and HRTEM images together with SAED patterns and FFT analyses, illustrating the local microstructure and crystallographic features discussed in the paper. The dataset is provided as supporting visual material for the TEM-based interpretation presented in the conference contribution.