Multivariate Statistical Analysis of Three-Spatial-Dimension TOF-SIMS Raw Data Sets

Three-spatial-dimension (3D) time-of-flight-secondary ion
mass spectrometry (TOF-SIMS) analysis can be performed if an X−Y image is saved at each depth of a depth
profile. In this paper, we will show how images reconstructed from specified depths, depth profiles generated
from specific X−Y coordinates, as well as three-spatial-dimensional rendering provide for a better understanding
of the sample than traditional depth profiling where only
a single spectrum is collected at each depth. We will also
demonstrate, for the first time, that multivariate statistical
analysis (MVSA) tools can be used to perform a rapid,
unbiased analysis of the entire 3D data set. In the example
shown here, retrospective analysis and MVSA revealed a
more complete picture of the 3D chemical distribution of
the sample than did the as-measured depth profiling
alone. Color overlays of the MVSA components as well as
animated movies allowing for visualization (in 3D) from
various angles will be provided.